shallow trench isolation oxide thickness leakage
由NRezzak著作·2010·被引用8次—Priortoradiationexposure,theleakagecurrentoftheparasiticdevicesislowduetotherelativelylargeeffectivegateoxidethickness(highthreshold ...,由VPGopinath著作·2001·被引用3次—Shallowtrenchlineroxidationschemeisshowntohavedi...
Shallow Trench Isolation Stress Effect on NMOS Transistor ...
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由JJu著作·2009—TheexperimentresultsshowthattheSTIstresslevelcanbemuchreducedbydecreasingSTIoxideRTAtemperatureandlineroxthickness,henceleadingtolower ...
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